Non-destructive and accurate characterization of high aspect ratio (HAR) and composite micro-trenches is essential for semiconductor inspection in fields like microelectromechanical systems (MEMS) and ...

(Nanowerk News) Optical measurement techniques collecting light intensity in the far-field such as conventional and confocal microscopy or coherence scanning interferometry (CSI) enable fast and ...

Topography becomes more important in quality assurance for manufacturing. This regards the characterization of macro-sized to medium optics and the optimization of a manufacturing process using a ...

A new imaging technique developed by Biwei Yin and interdisciplinary researchers at the Massachusetts General Hospital and Harvard Medical School in the U.S., provides resolution at the ...